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Wet Bench and Cleanroom
Materials and solutions for Wet Bench and Cleanroom
Solutions for Wet Bench and Cleanroom
Wet bench encompasses a large number of devices/applications where chemicals like acid/bases and solvents may be used. An example of a wet bench are chemical dip tanks for wafer etching. Front end of the line (FEOL) and back end of the line (BEOL) processes are typically where wet process tools are used. The typical applications here are etch, clean and strip. Wet bench devices must also be designed with cleanroom requirements in mind. For more details go to: Factory equipment,cleanroom and ESD.
Material properties
- Temperature resistance
- Excellent chemical resistance at varying pHs
- Very good mechanical properties
- In some cases, strict ignition, fire and smoke suppression are necessary and require the factory mutual rating 4910
Typical plastic materials used are
- PEEK (FM4910 resin used)
excellent chemical resistance and low outgassing for components like screws and fasteners - PET
good chemical resistance, strength, stiffness and toughness - PTFE
virtually non-reactive with all chemicals - ECTFE (FM4910 resin used)
typically used where there is exposure to harsh chemicals - PVDF FM4910
typically used where very harsh chemicals are used - PP, PPs
good chemical and acid resistance, UL94-V2, Bright White and Double Annealed - PVC FM4910
fire safe material meet factory mutual standards, typically used for cladding
Röchling materials for Wet Bench
PEEKSustaPEEK natural
PVDFSustaPVDF natural
PVC-UTrovidur® EC-FR
- PVC-U
Trovidur® EC-FR
Plastics for safe and high-grade Cleanrooms
Every clean room is different. Manufacturers must consider many factors, from the class of cleanroom through the range of uses to specific customer requirements. Structural elements such as walls, ceilings and air showers, ventilation and light fittings and the furnishings all need to be planned in detail. The right materials play an important role here.
Arrange technical advice
The performance and service life of plastics for use in the semiconductor industry are influenced by a variety of factors. These criteria need to be considered in order to make the right choice in materials. Examples:
- Antistatic or conductive properties
- Operating temperature
- Contact with chemicals
- Design requirements
- Dimensions and tolerances
- Flame retardancy
We are happy to advise you on the selection of suitable materials for your particular application. Just use our contact form at the bottom of the page.
